P. Kiryukhantsev-Korneev, K. Kuptsov, T. Sagalova, N. Shvindina, and A. Bondarev, “Diffusion-barrier properties and thermal stability of TiAlSiCN, TiAlSiCN/SiBCN, and TiAlSiCN/AlOx films”, diffusion, vol. 30, Dec. 2017.