WIRBELEIT, Frank. Non-gaussian diffusion model for phosphorus in silicon heavy-doped junctions. Diffusion Fundamentals, [S. l.], v. 9, 2009. DOI: 10.62721/diffusion-fundamentals.9.176. Disponível em: https://diffusion.journals.qucosa.de/diffusion/article/view/176. Acesso em: 10 apr. 2025.