Kiryukhantsev-Korneev, P.; Kuptsov, K.; Sagalova, T.; Shvindina, N.; Bondarev, A. Diffusion-Barrier Properties and Thermal Stability of TiAlSiCN, TiAlSiCN SiBCN, and TiAlSiCN AlOx Films. diffusion 2017, 30.