Diffusion-barrier properties and thermal stability of TiAlSiCN, TiAlSiCN/SiBCN, and TiAlSiCN/AlOx films - Kiryukhantsev-Korneev, Ph.V.; Kuptsov, K.A.; Sagalova, T.B.; Shvindina, N.V.; Bondarev, A.V. (Diffusion Fundamentals, 2017)